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H&L Associates

Stepper Description


For further stepper upgrade information or for a price quote, please fill in and submit the following form. If you find that a particular item is not found in one of the lists, select 'other' from the list of options and then try to describe the item in the comments field (max 80 characters).

Stepper Model  Metric  English
Serial number
MOP Version
Interface Chassis
Stage Resolution
Type of stages
Wafer handler (AWH)
Wafer leveller (AWL)
Die by Die
Focus control/offset
Wafertrac interface (WTI)  exists
RMS
Automatic wafer aligner (AWA)
SECS  exists
System type  dual rack  single rack
Line frequency  60Hz  50Hz
Column type
Lens
Platen Control (PPC)
Laser dose control
Laser weather compensation (ACS)  Serial  Parallel
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H&L Associates, 21 Parkmount Crescent, Ottawa, Ontario K2H 5T3, Canada
Tel: (613) 828-1462 Last updated : 2023-Jun-01