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UPG_IAS IAS Replacement Module
The later model GCA steppers, such as the Autostep, include an Integrated Alignment System (IAS). For those people who don't make use of this subsystem, the IAS can be a bit of a maintenance headache, not to mention the power consumption and the noise. Without the IAS installed, however, the user doesn't have control of the illumination needed to manually align the wafer.
In a typical application, the GCA stepper is an Autostep, running MOP (Master Operating Program) 7.3 and having a DEC VT340 terminal for user input/output. In this situation, the user will have control of the wafer alignment illumination through special keys on the keyboard (see the 'VT340 keyboard' image below) e.g. 'S/C', '1st Lev', 'Expose', 'Inc', 'Dec' etc. Without an IAS installed in the system , the keyboard controls are disabled and illumination control is lost.
The UPG_IAS unit restores the keyboard illumination control, even without the IAS in the system. The standard keys are recognised :
The UPG_IAS module (see images below) is approximately 54mm x 84mm x 23mm (2.1" x 3.3" x 0.9") and has the following connections:
If you have any questions or require further information then please contact us through the link below.